Features
- exciPure™ technology for increddible 10X gas lifetimes and the lowest cost of operation
- No expensive cryogenic gas purifier is required
- EasyClean automated optics seals to retain gas fill and reduce downtime during
optics maintenance - Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
- High-stability optics mounts for ultimate beam pointing accuracy
- Simple integration into industrial processing systems
- Microsoft® Surface Pro 4 remote control for the ultimate in simple operation, can be operated as a tablet or with the keyboard
Benefits
- Massive dynamic gas lifetime, low operating cost
- Simplifies optical maintenance, retains gas fill and passivation
- Delivers 200 microradian pointing stability
- No realignment required after cleaning or replacing optics
- Fast, precise energy stabilization in internal, burst and external trigger modes
- Excellent energy stability, better than 1.0% (KrF)
- Removes particulates and maintains optics cleanliness
Applications
- Pulsed Laser Deposition
- Precision Manufacturing
- Material Processing
- Drilling
- Wire Stripping
- Scientific Research
- LIDAR
- Laser Induced Breakdown Spectroscopy
仕様
Wavelength | 193nm ArF | 248nm KrF | 308 XeCl | 351 XeF |
---|---|---|---|---|
Maximum Pulse Energy (mJ) IPEX-740 | 230 | 475 | 300 | 275 |
Maximum Pulse Energy (mJ) IPEX-760 | 250 | 700 | 600 | 350 |
Stabilized Pulse Energy (mJ) IPEX-740 | 150 | 400 | 250 | 225 |
Stabilized Pulse Energy (mJ) IPEX-760 | 200 | 600 | 500 | 300 |
Stabilized Average Power (W) | ||||
IPEX-746 | 15 | 40 | 25 | 22 |
IPEX-744 | 7.5 | 20 | 12 | 11 |
IPEX-742 | 3.7 | 10 | 6 | 5.5 |
IPEX-766 | 10 | 30 | 25 | 15 |
IPEX-764 | 6 | 18 | 10 | 9 |
IPEX-762 | 3 | 9 | 5 | 4.5 |
Maximum Repetition Rate (Hz) | ||||
IPEX-746 | 100 | 100 | 100 | 100 |
IPEX-744 | 50 | 50 | 50 | 50 |
IPEX-742 | 25 | 25 | 25 | 25 |
IPEX-766 | 50 | 50 | 50 | 50 |
IPEX-764 | 30 | 30 | 20 | 30 |
IPEX-762 | 15 | 15 | 10 | 15 |
※上記仕様は全ての項目における最適値の仕様です。 ユーザーのご要望に合わせたカスタム仕様で提案をさせて頂きます。 ご希望の仕様を弊社営業部までお知らせください。 |